Optimal cut of quartz for a surface acoustic wave pressure sensor with non-uniform pressure load

This paper aimed to study the pressure sensitive coefficients of different cuts of quartz for the surface acoustic wave(SAW) pressure sensors with non-uniform pressure load, and tried to find the most sensitive cut. The finite element analysis/ perturbation theory combines model was constructed to calculate the pressure sensitive coefficients. For analysis of different cut angles (0, θ, φ) of quartz with φ (0~180°), θ (-90~90°), the optimal cuts angle of quartz(0°, 4.5°, 64.7°) was found.