Optimal cut of quartz for a surface acoustic wave pressure sensor with non-uniform pressure load

Author

Yi-yu Zhao ; Hong-lang Li ; Shi-tang He

Author_Institution

Lab. of Acoust. Micro-Electr. Mech. Syst., Inst. of Acoust., Beijing, China

fYear

2013

fDate

25-27 Oct. 2013

Firstpage

1

Lastpage

3

Abstract

This paper aimed to study the pressure sensitive coefficients of different cuts of quartz for the surface acoustic wave(SAW) pressure sensors with non-uniform pressure load, and tried to find the most sensitive cut. The finite element analysis/ perturbation theory combines model was constructed to calculate the pressure sensitive coefficients. For analysis of different cut angles (0, θ, φ) of quartz with φ (0~180°), θ (-90~90°), the optimal cuts angle of quartz(0°, 4.5°, 64.7°) was found.

Keywords

finite element analysis; perturbation theory; pressure sensors; quartz; surface acoustic wave sensors; finite element analysis; nonuniform pressure load; optimal cuts angle; perturbation theory; pressure sensitive coefficients; quartz; surface acoustic wave pressure sensor; Equations; Finite element analysis; Mathematical model; Sensitivity; Surface acoustic waves; Temperature sensors; non-uniform pressure load; pressure sensitive coefficients; pressure sensor; quartz; surface acoustic wave;

fLanguage

English

Publisher

ieee

Conference_Titel

Piezoelectricity, Acoustic Waves and Device Applications (SPAWDA), 2013 Symposium on

Conference_Location

Changsha

Print_ISBN

978-1-4799-3289-4

Type

conf

DOI

10.1109/SPAWDA.2013.6841109

Filename

6841109