3-D FEM simulation of piezoelectric boundary acoustic wave resonator

Author

Yan Zhang ; Jing Chen ; Wei-biao Wang ; Tao Han

Author_Institution

Dept. of Instrum. Sci. & Eng., Shanghai Jiao Tong Univ., Shanghai, China

fYear

2013

fDate

25-27 Oct. 2013

Firstpage

1

Lastpage

4

Abstract

In this paper, a 3D finite element method (FEM) is performed to accurately investigate the propagation characteristics of PBAW in SiO₂/metal grating/rotated YX-LiNbO₃ substrate structure by the commercial software of COMSOL Multiphysics. The simulated results show a SH-type PBAW with large K² in SiO₂/Cu grating/0° or 15° YX-LiNbO₃ substrate structure. The optimized structure has been obtained which could suppress spurious signals providing not seriously reducing K² of the main mode. It´s proved that the analysis is very helpful for understanding and design of such layered SAW devices.

Keywords

copper; finite element analysis; lithium compounds; niobium compounds; silicon compounds; surface acoustic wave resonators; 3D FEM simulation; COMSOL multiphysics; LiNbO₃; SH-type PBAW; SiO₂-Cu; commercial software; finite element method; layered SAW devices; metal grating-rotated substrate structure; piezoelectric boundary acoustic wave resonator; spurious signal suppression; Acoustic waves; Finite element analysis; Gratings; Lithium niobate; Substrates; Three-dimensional displays; 3-D FEM analysis; Rayleigh-type PBAW; SH-type PBAW; SiO2/Cu/YX-LiNbO3; large K²;

fLanguage

English

Publisher

ieee

Conference_Titel

Piezoelectricity, Acoustic Waves and Device Applications (SPAWDA), 2013 Symposium on

Conference_Location

Changsha

Print_ISBN

978-1-4799-3289-4

Type

conf

DOI

10.1109/SPAWDA.2013.6841130

Filename

6841130