Simulation of piezoresistive mems tactile sensor

The cost of the silicon-based MEMS fabrication is still relatively high, thus an alternative process should be developed for low cost applications. In this proposal, we are planning to develop a low-cost non-silicon-based process for MEMS tactile sensor fabrication. The MEMS tactile sensor with a trampoline membrane structure will be fabricated by sputtering of Cr, Al, AlN, Bariun Titanate (BaTiO₃), and Au layers through electroplated Ni microshadow masks over an 8μm-thick photoresist sacrificial layer on sapphire substrate. For the fabrication of efficient MEMS tactile sensor the proposed structure will be simulated using COMSOL, commercial MEMS simulation software.