DocumentCode
696576
Title
Load dynamics in piezoelectric actuation
Author
van Hulzen, J.R. ; Schitter, G. ; Van den Hof, P.M.J. ; van Eijk, J.
Author_Institution
Delft Center for Syst. & Control, Delft Univ. of Technol., Delft, Netherlands
fYear
2009
fDate
23-26 Aug. 2009
Firstpage
5009
Lastpage
5014
Abstract
High control performance is essential in many precision positioning applications, such as control of the vertical sample position in a atomic-force microscope (AFM). This paper investigates the impact of load flexibility on piezoelectrically actuated positioning systems in terms of control performance. The modeling method used combines modal analysis with simple transfer function manipulations, and shows, how the load dynamics may influence the control performance. The analysis is experimentally verified on a commercial AFM system.
Keywords
atomic force microscopy; modal analysis; piezoelectric actuators; position control; transfer functions; atomic-force microscope; commercial AFM system; control performance; load dynamics; load flexibility; modal analysis; piezoelectric actuation; piezoelectrically actuated positioning systems; precision positioning applications; transfer function manipulations; vertical sample position control; Decision support systems; Europe;
fLanguage
English
Publisher
ieee
Conference_Titel
Control Conference (ECC), 2009 European
Conference_Location
Budapest
Print_ISBN
978-3-9524173-9-3
Type
conf
Filename
7075194
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