Development of vibration suppression GUI tool based input preshaping control and its applications to wafer transfer robot and gantry loader systems

Speed up movement to increase productivity may cause problems such as vibration. This paper proposes a vibration suppression tool with visual graphical interface to solve the vibration problem based on input shaping approach. The proposed tool was then applied in real industry processes to solve the vibration problems of semiconductor wafer transfer robot and gantry loader in high speed operation and good results were obtained that confirm the validity of the tool.