Wideband Visible Wavelength Range MEMS Fabry–Perot Tunable Filter With Highly Accurate Calibration System

Author

Hirokubo, Nozomu ; Komatsu, Hiroyoshi ; Hashimoto, Noriaki ; Sonehara, Makoto ; Sato, Takao

Author_Institution

Core Technol. Dev. Center, Seiko Epson Corp., Fujimi-machi, Japan

Volume

13

Issue

8

fYear

2013

fDate

Aug. 2013

Firstpage

2930

Lastpage

2936

Abstract

A novel microelectromechanical systems (MEMS) Fabry-Perot tunable filter (FPTF) and calibration system for accurately controlling the wavelength of the transmission peak in the wide wavelength range of visible light are reported. The MEMS FPTF consists of a Fabry-Perot filter having Ag alloy mirrors, an electrostatic actuator, and a capacitive gap sensor. The calibration system consists of the capacitive gap sensor, a capacitance measurement circuit, and a voltage controller. Through introducing the calibration system to MEMS FPTF, wavelength accuracy of more than ±1 nm is achieved. This is the accuracy level required for high-accuracy spectrum measurement in the range from 400 to 700 nm.

Keywords

calibration; capacitance measurement; capacitive sensors; electrostatic actuators; micro-optomechanical devices; micromirrors; microsensors; optical filters; optical tuning; silver alloys; visible spectra; voltage regulators; Ag alloy mirrors; MEMS FPTF; MEMS Fabry-Perot tunable filter; capacitance measurement circuit; capacitive gap sensor; electrostatic actuator; high-accuracy spectrum measurement; highly accurate calibration system; microelectromechanical systems; visible light; voltage controller; wavelength 400 nm to 700 nm; wavelength transmission; wideband visible wavelength; Optical filters; electrostatic actuators; nanopositioning; optical device fabrication;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2013.2264458

Filename

6517878