• DocumentCode
    702847
  • Title

    Compact device for CO2 optical sensing using macroporous silicon photonic crystals

  • Author

    Vega, Didac ; Rodriguez, Angel ; Trifonov, Trifon ; Calavia, Raul ; Vilanova, Xavier

  • Author_Institution
    Dept. d´Eng. Electron., Univ. Politec. de Catalunya (UPC), Barcelona, Spain
  • fYear
    2015
  • fDate
    11-13 Feb. 2015
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    A photonic crystal based on a macroporous silicon structure has been fabricated and successfully used for the detection of carbon dioxide. In this paper, the device and the measurement results are presented. The sensing device here described uses an optical approach to the detection of the gas. The use of a photonic crystal allows creating a compact device working in the medium infrared spectral range. A 700 nm square lattice macroporous structure was fabricated by electrochemical etching, creating a photonic gap centered at the 4.2 μm, a CO2 absorption line. The obtained results rely only on the absorption spectra measurement.
  • Keywords
    carbon compounds; elemental semiconductors; etching; gas sensors; optical fabrication; optical lattices; optical sensors; photonic crystals; porous semiconductors; silicon; CO2; Si; absorption spectra measurement; carbon dioxide detection; electrochemical etching; gas detection; macroporous silicon photonic crystals; medium infrared spectral range; optical sensing; photonic gap; square lattice macroporous structure; wavelength 4.2 mum; Absorption; Optical device fabrication; Photonic crystals; Reflectivity; Sensors; Silicon; chemical sensors; electrochemical etching; gas sensors; macroporous silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices (CDE), 2015 10th Spanish Conference on
  • Conference_Location
    Madrid
  • Type

    conf

  • DOI
    10.1109/CDE.2015.7087494
  • Filename
    7087494