Title :
Patterned CNT-PDMS nanocomposites for flexible pressure sensors
Author :
Sousa, P.J. ; Silva, L.R. ; Goncalves, L.M. ; Minas, G.
Author_Institution :
MEMS-UMinho Res. Unit, Univ. of Minho, Guimaraes, Portugal
Abstract :
This paper reports the fabrication process and characterization of a flexible pressure sensor based on polydimethylsiloxane (PDMS) and multi-walled carbon nanotubes (CNT-PDMS). The proposed approach relies on patterned CNT-PDMS nanocomposite strain gauges fabricated with SU-8 microstructures (with the micropatterns) in a low-cost and simple fabrication process. This nanocomposite polymer is mounted over a PDMS membrane, which, in turn, lies on top of a PDMS diaphragm like structure. This configuration enables the PDMS membrane to bend when pressure is applied, thereby affecting the nanocomposite strain gauges, effectively changing their electrical resistance. Carbon nanotubes have several advantages such as excellent mechanical properties, high electrical conductivity and thermal stability. Furthermore, the measurement range of the proposed sensor can be adapted according to the application by varying the CNTs content and geometry of microstructure. In addition, the sensor´s biocompatibility, low cost and simple fabrication makes it very appealing for biomechanical strain sensing. The sensor´s sensitivity was about 0.073%ΔR/mmHg.
Keywords :
1/f noise; filled polymers; flexible electronics; membranes; multi-wall carbon nanotubes; nanocomposites; nanofabrication; nanopatterning; nanosensors; pressure sensors; strain gauges; strain sensors; two-dimensional digital filters; C; PDMS diaphragm-like structure; PDMS membrane; SU-8 microstructures; biomechanical strain sensing; electrical conductivity; electrical resistance; flexible pressure sensors; mechanical properties; micropatterns; microstructure; multiwalled carbon nanotubes; nanocomposite polymer; patterned CNT-PDMS nanocomposite strain gauges; polydimethylsiloxane; sensor biocompatibility; sensor sensitivity; thermal stability; Carbon nanotubes; Fabrication; Microstructure; Nanocomposites; Polymers; Sensors; Strain; CNT-PDMS nanocomposite; piezoresistivity; polymeric strain gauges;
Conference_Titel :
Bioengineering (ENBENG), 2015 IEEE 4th Portuguese Meeting on
Conference_Location :
Porto
DOI :
10.1109/ENBENG.2015.7088850