Modelling PSF of scanning electron microscopes for image restoration

A procedure to determine the point spread function (PSF) of a two-dimensional SEM imaging system based on experimental data is presented. The specimen required for capture by the imaging system is simple to manufacture, and only requires a sharp edge to be of use. An overview is given of caveats that exist at each stage of the process, in addition to a breakdown of the process itself. Results based on a Scanning Electron Microscope are shown. The use of a PSF estimated in this fashion is shown to result in much improved restorations, when compared to its theoretical equivalent.