Title :
The use of quartz packaging for SAW-based sensors
Author :
Lukyanov, D. ; Shevchenko, S. ; Kukaev, A. ; Filippova, E. ; Khivrich, M.
Author_Institution :
Dept. of Laser Meas. & Navig. Syst., St.-Petersburg Electrotech. Univ. “LETI”, St. Petersburg, Russia
Abstract :
The importance of the use of silica packing for gyroscopes and accelerometers quartz packaging is demonstrated. Technology of quartz packaging providing the ability to adjust the frequency of the laser resonator and the simultaneous formation of structures on opposite sides of the console using laser is discussed.
Keywords :
accelerometers; electronics packaging; gyroscopes; measurement by laser beam; surface acoustic wave resonators; surface acoustic wave sensors; SAW-based sensor; accelerometer quartz packaging; gyroscope; laser resonator; silica packing; Electrodes; Gold; Gyroscopes; Micromechanical devices; Packaging; Substrates; Surface acoustic waves; laser frequency adjustment; micro electromechanical systems (MEMS) micromechanical accelerometer (MMA); quartz packaging;
Conference_Titel :
Young Researchers in Electrical and Electronic Engineering Conference (EIConRusNW), 2015 IEEE NW Russia
Conference_Location :
St. Petersburg
Print_ISBN :
978-1-4799-7305-7
DOI :
10.1109/EIConRusNW.2015.7102226
