Title :
Disk resonator gyroscope with whole-angle mode operation
Author :
Taheri-Tehrani, Parsa ; Izyumin, Oleg ; Izyumin, Igor ; Ahn, Chae H. ; Ng, Eldwin J. ; Hong, Vu A. ; Yang, Yushi ; Kenny, Thomas W. ; Boser, Bernhard E. ; Horsley, David A.
Author_Institution :
Univ. of California, Davis, Davis, CA, USA
Abstract :
We present a demonstration of a whole-angle mode operation of a 0.6 mm single-crystal silicon disk resonator gyroscope (DRG). This device has a Q factor of ~80,000 and a resonant frequency of ~250 kHz and is fabricated in the epi-seal process. Discrete-time control algorithms for rate-integrating gyro operation were implemented based on Lynch´s algorithm. Despite the fact that this DRG is over 5 orders of magnitude smaller than the 58 mm HRG, the device´s error sources are shown to be accurately modeled by the basic error models developed by Lynch.
Keywords :
angular measurement; crystal resonators; discrete time systems; gyroscopes; piezoelectric transducers; seals (stoppers); DRG; HRG; Lynch algorithm; discrete-time control algorithm; episeal process; rate-integrating gyro operation; single-crystal silicon disk resonator gyroscope; size 0.6 mm; whole-angle mode operation; Force; Force measurement; Frequency measurement; Gyroscopes; Micromechanical devices; Tuning; Vibrations; Discrete-time control; Disk resonator; Gyroscope; MEMS; Quadrature; Rate integrating; Whole angle mode;
Conference_Titel :
Inertial Sensors and Systems (ISISS), 2015 IEEE International Symposium on
Conference_Location :
Hapuna Beach, HI
DOI :
10.1109/ISISS.2015.7102360
