Disk resonator gyroscope with whole-angle mode operation

Author

Taheri-Tehrani, Parsa ; Izyumin, Oleg ; Izyumin, Igor ; Ahn, Chae H. ; Ng, Eldwin J. ; Hong, Vu A. ; Yang, Yushi ; Kenny, Thomas W. ; Boser, Bernhard E. ; Horsley, David A.

Author_Institution

Univ. of California, Davis, Davis, CA, USA

fYear

2015

fDate

23-26 March 2015

Firstpage

1

Lastpage

4

Abstract

We present a demonstration of a whole-angle mode operation of a 0.6 mm single-crystal silicon disk resonator gyroscope (DRG). This device has a Q factor of ~80,000 and a resonant frequency of ~250 kHz and is fabricated in the epi-seal process. Discrete-time control algorithms for rate-integrating gyro operation were implemented based on Lynch´s algorithm. Despite the fact that this DRG is over 5 orders of magnitude smaller than the 58 mm HRG, the device´s error sources are shown to be accurately modeled by the basic error models developed by Lynch.

Keywords

angular measurement; crystal resonators; discrete time systems; gyroscopes; piezoelectric transducers; seals (stoppers); DRG; HRG; Lynch algorithm; discrete-time control algorithm; episeal process; rate-integrating gyro operation; single-crystal silicon disk resonator gyroscope; size 0.6 mm; whole-angle mode operation; Force; Force measurement; Frequency measurement; Gyroscopes; Micromechanical devices; Tuning; Vibrations; Discrete-time control; Disk resonator; Gyroscope; MEMS; Quadrature; Rate integrating; Whole angle mode;

fLanguage

English

Publisher

ieee

Conference_Titel

Inertial Sensors and Systems (ISISS), 2015 IEEE International Symposium on

Conference_Location

Hapuna Beach, HI

Type

conf

DOI

10.1109/ISISS.2015.7102360

Filename

7102360