Measurement technique of vibrational distribution using static electricity and capacitance

We propose a noncontact vibrational distribution measurement technique using static electricity and a capacitance sensor array. A vibrating object was intentionally charged, and a time-varying electric field was induced in this study. The vibrational amplitude and frequency of the object were measured by detecting a change in the capacitance between the object and a sensor. The sensor used for detection comprises a parallel plate of sensors of diameter Φ1 mm. The vibrational distribution over an area of 25 mm × 25 mm with an amplitude of 100 μm was measured in 1 s by simultaneously processing the detected signal using a capacitance sensor array.