Title :
Wake up MEMS for inertial sensors
Author :
Stoeckel, Chris ; Billep, Detlef ; Konietzka, Stefan ; Zimmermann, Sven ; Otto, Thomas
Author_Institution :
Dept. Multi Device Integration, Fraunhofer ENAS, Chemnitz, Germany
Abstract :
A piezoelectric MEMS with wake up function, Power down interrupt generator (PDIG), for inertial sensor systems is reported. The aluminum nitride based MEMS generates electric signals intrinsically in result of an inertial accelerations. The PDIG is optimized for maximum charge and voltage sensitivity. The charge sensitivity for a single electrode designed PDIG is measured with 40.1 pC/g and the maximum voltage sensitivity with 1.273 V/g. The device shows a high linearity and reproducibility. The PDIG is merged with a CMOS electronic, designed for low current consumption in sleeping mode. The minimum acceleration to wake up the system is adjustable and measured with 0.08 g.
Keywords :
CMOS integrated circuits; aluminium compounds; inertial navigation; inertial systems; microsensors; signal generators; AlN; CMOS electronic; PDIG optimization; charge sensitivity; electric signal generation; inertial acceleration; inertial sensor system; linearity; piezoelectric MEMS; power down interrupt generator; reproducibility; single electrode; sleeping mode; voltage sensitivity; wake up function; Aluminum nitride; Capacitance; Electrodes; Micromechanical devices; Sensitivity; Sensors; Silicon; AlN; MEMS; PDIG; Wake up; aluminum nitride; low power; ultra low power;
Conference_Titel :
Inertial Sensors and Systems (ISISS), 2015 IEEE International Symposium on
Conference_Location :
Hapuna Beach, HI
DOI :
10.1109/ISISS.2015.7102385
