Wake up MEMS for inertial sensors

Author

Stoeckel, Chris ; Billep, Detlef ; Konietzka, Stefan ; Zimmermann, Sven ; Otto, Thomas

Author_Institution

Dept. Multi Device Integration, Fraunhofer ENAS, Chemnitz, Germany

fYear

2015

fDate

23-26 March 2015

Firstpage

1

Lastpage

4

Abstract

A piezoelectric MEMS with wake up function, Power down interrupt generator (PDIG), for inertial sensor systems is reported. The aluminum nitride based MEMS generates electric signals intrinsically in result of an inertial accelerations. The PDIG is optimized for maximum charge and voltage sensitivity. The charge sensitivity for a single electrode designed PDIG is measured with 40.1 pC/g and the maximum voltage sensitivity with 1.273 V/g. The device shows a high linearity and reproducibility. The PDIG is merged with a CMOS electronic, designed for low current consumption in sleeping mode. The minimum acceleration to wake up the system is adjustable and measured with 0.08 g.

Keywords

CMOS integrated circuits; aluminium compounds; inertial navigation; inertial systems; microsensors; signal generators; AlN; CMOS electronic; PDIG optimization; charge sensitivity; electric signal generation; inertial acceleration; inertial sensor system; linearity; piezoelectric MEMS; power down interrupt generator; reproducibility; single electrode; sleeping mode; voltage sensitivity; wake up function; Aluminum nitride; Capacitance; Electrodes; Micromechanical devices; Sensitivity; Sensors; Silicon; AlN; MEMS; PDIG; Wake up; aluminum nitride; low power; ultra low power;

fLanguage

English

Publisher

ieee

Conference_Titel

Inertial Sensors and Systems (ISISS), 2015 IEEE International Symposium on

Conference_Location

Hapuna Beach, HI

Type

conf

DOI

10.1109/ISISS.2015.7102385

Filename

7102385