• DocumentCode
    707940
  • Title

    Minimal realization of dynamically balanced lumped mass WA gyroscope: dual foucault pendulum

  • Author

    Senkal, Doruk ; Efimovskaya, Alexandra ; Shkel, Andrei M.

  • Author_Institution
    Microsyst. Lab., Univ. of California, Irvine, Irvine, CA, USA
  • fYear
    2015
  • fDate
    23-26 March 2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We report a new type of MEMS rate integrating gyroscope. The Dual Foucault Pendulum (DFP) gyroscope consists of two dynamically equivalent, mechanically coupled proof masses, oscillating in anti-phase motion, creating a dynamically balanced resonator with x-y symmetry in frequency and damping. Phase synchronization is established by mechanical coupling of the two proof masses, whereas quadrature suppression is achieved by four differential shuttle pairs placed in-between. Dual axis tuning fork behavior provides vibration immunity and anchor loss mitigation, resulting in a Qfactor over 100,000 on both modes at a center frequency of 2.7 kHz. Whole angle mechanization is demonstrated by FPGAbased closed loop control of the gyroscope, showing a scale factor variation of 22 ppm RMS over 2 hours of measurement. We believe Dual Foucault Pendulum is the minimal realization of a dynamically balanced lumped mass whole angle (WA) gyroscope.
  • Keywords
    angular measurement; closed loop systems; field programmable gate arrays; gyroscopes; mass measurement; microsensors; pendulums; synchronisation; vibration measurement; vibrations; DFP gyroscope; FPGA-based closed loop control; MEMS rate integrating gyroscope; anchor loss mitigation; antiphase motion; differential shuttle pair; dual axis tuning fork; dual foucault pendulum gyroscope; dynamically balanced lumped mass WA gyroscope; dynamically balanced resonator; frequency 2.7 kHz; mechanical coupled proof mass; phase synchronization; quadrature suppression; vibration immunity; whole angle gyroscope; whole angle mechanization; x-y symmetry; Couplings; Damping; Gain control; Gyroscopes; Micromechanical devices; Phase locked loops; Vibrations; Rate integrating MEMS gyroscope; closed loop control; tuning fork behaviour; whole angle mechanization;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Inertial Sensors and Systems (ISISS), 2015 IEEE International Symposium on
  • Conference_Location
    Hapuna Beach, HI
  • Type

    conf

  • DOI
    10.1109/ISISS.2015.7102394
  • Filename
    7102394