A virtual instrument design for low-cost charge-pumping characterization of integrated MOSFETs

Charge pumping techniques are used to characterize and quantify the interface state densities in Metal-Oxide-Semiconductor Field-Effect Transistors (MOSFET). When carried in a semiconductor production line, this technique needs to be time efficient, calling for automated testing environments. Moreover, the cost of the characterization equipment used in the test is always a factor of relevance for budget conscious operation. In this paper we present the design of an automated Virtual Instrumentation Environment (VIE) for performing charge pumping characterization using low cost, off-the-shelf instrumentation. A discussion is presented of tradeoffs and design considerations for obtaining a functional design without compromising test flexibility and accuracy.