Modeling and model-based control of temperature in an SThM probe

Author

Lenczner, Michel ; Bin Yang ; Abaidi, Mohamed ; Bontempi, Alexia ; Teyssieux, Damien ; Koehler, Bernd ; Janus, Pawel

Author_Institution

Time & Freq. Dept., Tech. Univ. of Belfort-Montbeliard, Besancon, France

fYear

2015

fDate

19-22 April 2015

Firstpage

1

Lastpage

7

Abstract

We present a multi-scale model of a probe for scanning thermal microscopy. The probe is built by microfabrication techniques. In active mode, it is supplied by a source of harmonic and/or continuous current and the tip temperature is measured after a lock-in amplifier. The model distinguishes two time scales and two space scales. Simulation results show the potential of the model in terms of accuracy and computation speed and they are compared to experimental results. Finally, a temperature control law constructed from this model is stated.

Keywords

electric current measurement; microfabrication; scanning probe microscopy; temperature control; temperature measurement; SThM probe; active mode; continuous current measurement; lock-in amplifier; microfabrication technique; model-based temperature control law; multiscale model; scanning thermal microscopy; space scale; time scale; tip temperature measurement; Accuracy; Computational modeling; Harmonic analysis; Heating; Integrated circuits; Probes; Silicon; Multiscale Modeling; Scanning Thermal Microscopy; Temperature Control;

fLanguage

English

Publisher

ieee

Conference_Titel

Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2015 16th International Conference on

Conference_Location

Budapest

Print_ISBN

978-1-4799-9949-1

Type

conf

DOI

10.1109/EuroSimE.2015.7103117

Filename

7103117