Title :
Modeling and model-based control of temperature in an SThM probe
Author :
Lenczner, Michel ; Bin Yang ; Abaidi, Mohamed ; Bontempi, Alexia ; Teyssieux, Damien ; Koehler, Bernd ; Janus, Pawel
Author_Institution :
Time & Freq. Dept., Tech. Univ. of Belfort-Montbeliard, Besancon, France
Abstract :
We present a multi-scale model of a probe for scanning thermal microscopy. The probe is built by microfabrication techniques. In active mode, it is supplied by a source of harmonic and/or continuous current and the tip temperature is measured after a lock-in amplifier. The model distinguishes two time scales and two space scales. Simulation results show the potential of the model in terms of accuracy and computation speed and they are compared to experimental results. Finally, a temperature control law constructed from this model is stated.
Keywords :
electric current measurement; microfabrication; scanning probe microscopy; temperature control; temperature measurement; SThM probe; active mode; continuous current measurement; lock-in amplifier; microfabrication technique; model-based temperature control law; multiscale model; scanning thermal microscopy; space scale; time scale; tip temperature measurement; Accuracy; Computational modeling; Harmonic analysis; Heating; Integrated circuits; Probes; Silicon; Multiscale Modeling; Scanning Thermal Microscopy; Temperature Control;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2015 16th International Conference on
Conference_Location :
Budapest
Print_ISBN :
978-1-4799-9949-1
DOI :
10.1109/EuroSimE.2015.7103117
