DocumentCode
708110
Title
Computational electrohydrodynamics in the fabrication of hollow polymer microstructures
Author
Tonry, C. ; Patel, M. ; Desmuliez, M. ; Yu, W. ; Bailey, C.
Author_Institution
Comput. Mech. & Reliability Group (CMRG), Univ. of Greenwich, London, UK
fYear
2015
fDate
19-22 April 2015
Firstpage
1
Lastpage
5
Abstract
Electric Field Assisted Capillarity is a novel process which has the potential for the fabrication of hollow polymer microstructures as a single step process. The process has been shown to work experimentally on a microscale using PDMS. The process makes use of both the electrohydrodynamics of polymers at a microscale and also the capillary force on the polymer caused by a low contact angle on a heavily wetted surface. Discussed in this paper are the results of a two-dimensional numerical simulation of the process. The results presented here are for the an angular mask producing microchannels and demonstrate how differing contact angles on the top mask effect the thickness of the top of the microstructures and also whether the fabrication of the microstructure is possible at all.
Keywords
capillarity; electrohydrodynamics; masks; microfabrication; computational electrohydrodynamics; contact angles; electric field assisted capillarity; heavily wetted surface; hollow polymer microstructures; microchannels; Manganese; Mathematical model; Microstructure;
fLanguage
English
Publisher
ieee
Conference_Titel
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2015 16th International Conference on
Conference_Location
Budapest
Print_ISBN
978-1-4799-9949-1
Type
conf
DOI
10.1109/EuroSimE.2015.7103153
Filename
7103153
Link To Document