• DocumentCode
    708110
  • Title

    Computational electrohydrodynamics in the fabrication of hollow polymer microstructures

  • Author

    Tonry, C. ; Patel, M. ; Desmuliez, M. ; Yu, W. ; Bailey, C.

  • Author_Institution
    Comput. Mech. & Reliability Group (CMRG), Univ. of Greenwich, London, UK
  • fYear
    2015
  • fDate
    19-22 April 2015
  • Firstpage
    1
  • Lastpage
    5
  • Abstract
    Electric Field Assisted Capillarity is a novel process which has the potential for the fabrication of hollow polymer microstructures as a single step process. The process has been shown to work experimentally on a microscale using PDMS. The process makes use of both the electrohydrodynamics of polymers at a microscale and also the capillary force on the polymer caused by a low contact angle on a heavily wetted surface. Discussed in this paper are the results of a two-dimensional numerical simulation of the process. The results presented here are for the an angular mask producing microchannels and demonstrate how differing contact angles on the top mask effect the thickness of the top of the microstructures and also whether the fabrication of the microstructure is possible at all.
  • Keywords
    capillarity; electrohydrodynamics; masks; microfabrication; computational electrohydrodynamics; contact angles; electric field assisted capillarity; heavily wetted surface; hollow polymer microstructures; microchannels; Manganese; Mathematical model; Microstructure;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2015 16th International Conference on
  • Conference_Location
    Budapest
  • Print_ISBN
    978-1-4799-9949-1
  • Type

    conf

  • DOI
    10.1109/EuroSimE.2015.7103153
  • Filename
    7103153