Title :
A test structure for characterizing the cleanliness of glass beads using low-frequency dielectric spectroscopy
Author_Institution :
Decagon Devices, Inc., Pullman, WA, USA
Abstract :
The cleanliness of glass beads was assessed using a test structure and low-frequency dielectric spectroscopy operating between 10 mHz and 100 kHz. Glass beads were exposed to moisture between 40 and 85% RH. Results indicate that capillary and film water can be used to indicate the state of cleanliness.
Keywords :
dielectric measurement; glass; hygiene; surface contamination; capillary; film water; frequency 10 mHz; frequency 100 kHz; glass bead cleanliness; low-frequency dielectric spectroscopy; test structure; Films; Humidity; Moisture; Permittivity; Spectroscopy;
Conference_Titel :
Microelectronic Test Structures (ICMTS), 2015 International Conference on
Conference_Location :
Tempe, AZ
Print_ISBN :
978-1-4799-8302-5
DOI :
10.1109/ICMTS.2015.7106111
