Title :
NPN CML ring oscillators for model verification and process monitoring
Author_Institution :
MACOM, Newport Beach, CA, USA
Abstract :
A set of NPN CML (Current Mode Logic) oscillators is designed in a 0.18um SiGe BiCMOS process, with the intention to provide model verification and process monitoring capabilities. The main design goals are that the oscillators need to be small and easy to test such that many of them can be placed in the scribe line and be measured by production PCM test equipment.
Keywords :
BiCMOS digital integrated circuits; Ge-Si alloys; current-mode logic; integrated circuit design; oscillators; process monitoring; BiCMOS process; NPN CML ring oscillators; SiGe; current mode logic oscillators; model verification; process monitoring capabilities; production PCM test equipment; size 0.18 mum; CMOS integrated circuits; Latches; Logic gates; Phase change materials; Ring oscillators; Standards;
Conference_Titel :
Microelectronic Test Structures (ICMTS), 2015 International Conference on
Conference_Location :
Tempe, AZ
Print_ISBN :
978-1-4799-8302-5
DOI :
10.1109/ICMTS.2015.7106118
