Abstract :
The following topics are dealt with: array structures; integrated circuit modeling; process evaluation; parameter extraction; capacitance; resistance; and RF circuits.
Keywords :
capacitance; electric resistance; integrated circuit modelling; radiofrequency integrated circuits; transistors; RF circuit; capacitance; integrated circuit modeling; parameter extraction; process evaluation; radiofrequency circuit; resistance; transistor array structure;
Conference_Titel :
Microelectronic Test Structures (ICMTS), 2015 International Conference on
Conference_Location :
Tempe, AZ
Print_ISBN :
978-1-4799-8302-5
DOI :
10.1109/ICMTS.2015.7106157