Systematic design strategies for multi-physical RF systems using the example of MEMS oscillator

Latest trends in nearly all domains of daily life require “smart” systems, meaning the combination of sensors and actuators in different physical domains with an intelligent signal processing. As market trends tend to more diversity as well as cheaper and smaller devices, i.e. integrated, heterogeneous systems, shorter design cycles and more flexibility hold the key for the development of such smart sensor/actuator systems. Currently, the design flows for heterogeneous systems are separated. If seamless RF-MEMS design methodology for monolithic and hybrid systems overcomes current methodology and tool discrepancies in electronic and mechanical-design flows, further capabilities can be made available. This paper gives an overview of requirements on and solution approaches for an integrated design flow for RF-MEMS.