High Precision Active-Matrix Self-Capacitive Touch Panel Based on Fluorinated ZnO Thin-Film Transistor

Matrix-addressed capacitive sensing is popularly employed in advanced multi-touch panels. While the number of simultaneous touch points of a passively addressed matrix is limited, the simultaneous touch points of an actively addressed matrix are constrained only by the size of the matrix and can be more densely packed. Since the touch panel is typically inserted between a display panel and the user, it would be the best if the transistors in an active-matrix touch panel are transparent. Reported presently is such a panel realized using a fluorinated zinc oxide transparent thin-film transistor technology. The technology can be applied to construct panels requiring high touch resolution, such as precision stylus pen-based writing, fingerprint sensing and sensing of the area of the touch, etc.