Title :
A novel high level ESD FDNSCR with drain side engineering in PMIC application
Author :
Yi-Ning He ; Jhih-Ming Wang ; Tien-Hao Tang ; Kuan-Cheng Su
Author_Institution :
ESD Eng. Dept., United Microelectron. Corp., Hsinchu, Taiwan
Abstract :
In order to develop cost-effective System-on-Chip (SoC) solutions, it is important to implement High-Voltage (HV) tolerant devices using standard CMOS technologies for varied applications, such as display and LED drivers, flash memories, automotive applications etc. However, the on-chip ESD protection designs are required to provide higher robustness to prevent chip from ESD damage. Silicon Controlled Rectifiers (SCR) have been widely used, because of their superior area-efficient ESD robustness [1-3]. However, lower failure current It2 has been observed during ESD stress on Field Drift MOSFET Silicon Controlled Rectifier (FDNSCR) devices in 0.18μm BCD epi process. The root cause of early failure is related to low turn-on efficiency of SCR during ESD stress.
Keywords :
CMOS integrated circuits; electrostatic discharge; power integrated circuits; system-on-chip; thyristors; BCD epi process; CMOS technology; ESD damage; ESD stress; HV tolerant device; LED driver; PMIC application; SoC; automotive application; drain side engineering; failure current; field drift MOSFET silicon controlled rectifier; flash memory; high level ESD FDNSCR; high-voltage tolerant device; on-chip ESD protection design; power management integrated circuit; size 0.18 mum; system-on-chip; Anodes; Current density; Electrostatic discharges; Layout; Resistance; System-on-chip; Thyristors;
Conference_Titel :
Reliability Physics Symposium (IRPS), 2015 IEEE International
Conference_Location :
Monterey, CA
DOI :
10.1109/IRPS.2015.7112795