Title :
Electrical model of an NMOS body biased structure in triple-well technology under photoelectric laser stimulation
Author :
Borrel, N. ; Champeix, C. ; Lisart, M. ; Sarafianos, A. ; Kussener, E. ; Rahajandraibe, W. ; Dutertre, J.-M.
Author_Institution :
STMicroelectron., Rousset, France
Abstract :
This study is driven by the need to optimize failure analysis methodologies based on laser/silicon interactions with an integrated circuit using a triple-well process. It is therefore mandatory to understand the behavior of elementary devices to laser illumination, in order to model and predict the behavior of more complex circuits. This paper presents measurements of the photoelectric currents induced by a pulsed-laser on an NMOS transistor in triple-well Psubstrate/DeepNwell/Pwell structure dedicated to low power body biasing techniques. This evaluation compares the triple-well structure to a classical Psubstrate-only structure of an NMOS transistor. It reveals the possible activation change of the bipolar transistors. Based on these experimental measurements, an electrical model is proposed that makes it possible to simulate the effects induced by photoelectric laser stimulation.
Keywords :
MOSFET; failure analysis; photoelectricity; semiconductor device measurement; semiconductor device models; semiconductor device reliability; NMOS body biased structure; NMOS transistor; P-substrate-only structure; bipolar transistors; electrical model; failure analysis methodology; integrated circuit; laser illumination; laser-silicon interactions; low power body biasing techniques; photoelectric current measurements; photoelectric laser stimulation; pulsed-laser; triple-well P-substrate-deep Nwell-Pwell structure; triple-well process; triple-well technology; Integrated circuit modeling; Junctions; Laser modes; MOS devices; Measurement by laser beam; Power lasers; Semiconductor lasers; NMOS transistor; body biasing; parasitic bipolar transistor; pulsed PLS; triple-well;
Conference_Titel :
Reliability Physics Symposium (IRPS), 2015 IEEE International
Conference_Location :
Monterey, CA
DOI :
10.1109/IRPS.2015.7112799