Title :
A new self-sensing approach for actuation and readout of piezoelectric resonating sensor
Author :
Azadmehr, Mehdi ; Khajeh, Belal K. ; Berg, Yngvar
Author_Institution :
Inst. of Microsyst. Technol., Buskerud & Vestfold Univ. Coll., Horten, Norway
Abstract :
In this paper we proposed a new approach to actuate and readout of resonating piezoelectric sensors to realize concept of self-sensing. In the circuit three transistors are used to differentiate between actuation and readout modes. We evaluated a given piezoelectric resonating sensor and the proposed circuit analytically and with simulations. We also evaluated the applicability of our circuit for mass detection purposes and showed that piezoelectric resonant sensor with our proposed circuit can be a good candidate for mass detection in picogram range.
Keywords :
crystal resonators; electric sensing devices; mass measurement; piezoelectric actuators; piezoelectric transducers; readout electronics; transistors; actuation mode; mass detection; piezoelectric resonating sensor; readout mode; self-sensing approach; transistor; Integrated circuit modeling; Mathematical model; Resonant frequency; Sensitivity; Sensors; Structural beams; Switching circuits;
Conference_Titel :
Networking, Sensing and Control (ICNSC), 2015 IEEE 12th International Conference on
Conference_Location :
Taipei
DOI :
10.1109/ICNSC.2015.7116040