• DocumentCode
    710624
  • Title

    3D microelectronic with BEOL compatible devices

  • Author

    Drouin, D. ; A-Bounouar, M. ; Droulers, G. ; Labalette, M. ; Pioro-Ladriere, M. ; Souifi, A. ; Ecoffey, S.

  • Author_Institution
    Lab. Nanotechnol. Nanosystemes (LN2), Univ. de Sherbrooke, Sherbrooke, QC, Canada
  • fYear
    2015
  • fDate
    27-29 April 2015
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    This presentation will address the potential of nanoelectronic devices 3D monolithic integration in the CMOS back-end-of-line (BEOL) to add functionality and enhance integrated circuits (ICs) performances.
  • Keywords
    CMOS integrated circuits; nanoelectronics; three-dimensional integrated circuits; 3D microelectronic; 3D monolithic integration; BEOL compatible devices; CMOS back-end-of-line; integrated circuits; nanoelectronic devices; CMOS integrated circuits; Circuit synthesis; Logic gates; Microelectronics; Nanoscale devices; Performance evaluation; Three-dimensional displays; 3D integration; nanoelectronics; resistive RAM; single electron transistor; tunneling transistor;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Test Symposium (VTS), 2015 IEEE 33rd
  • Conference_Location
    Napa, CA
  • Type

    conf

  • DOI
    10.1109/VTS.2015.7116262
  • Filename
    7116262
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=710624