Title :
Investigation of hot carrier reliability of SOI and strained SOI transistors using back bias
Author :
Besnard, G. ; Garros, X. ; Subirats, A. ; Andrieu, F. ; Federspiel, X. ; Rafik, M. ; Schwarzenbach, W. ; Reimbold, G. ; Faynot, O. ; Cristoloveanu, S. ; Mazure, C.
Author_Institution :
CEA-LETI, Grenoble, France
Abstract :
In this paper, we investigate the potential of strained Silicon-On-Insulator for the future advanced CMOS nodes. Strained FDSOI devices not only exhibit a 30% higher performance in term of ION/IOFF but also show superior HC reliability at same drive current regardless of the back bias.
Keywords :
CMOS integrated circuits; hot carriers; semiconductor device reliability; silicon-on-insulator; CMOS nodes; back bias; hot carrier reliability; silicon-on-insulator; strained SOI transistors; Degradation; Performance evaluation; Reliability; Silicon; Silicon-on-insulator; Stress; Transistors;
Conference_Titel :
VLSI Technology, Systems and Application (VLSI-TSA), 2015 International Symposium on
Conference_Location :
Hsinchu
DOI :
10.1109/VLSI-TSA.2015.7117577