Title :
RF MEMS in competition with semiconductor technology
Author :
Shah, Syed Umer Abbas
Author_Institution :
KTH (R. Inst. of Technol.), Stockholm, Sweden
Abstract :
Summary form only given. This talk will give an overview on radio-frequency microelectromechanical systems (RF MEMS), its current state of development and performance, and comparison between commercial RF MEMS products and its semiconductor technology competition, in particular for reconfigurable RF front-ends. Furthermore, the presentation also gives an outline into emerging fields in RF/microwave engineering which are enabled by MEMS technologies, including reconfigurable millimeter and submillimeter-wave microsystems.
Keywords :
micromechanical devices; semiconductor technology; submillimetre wave devices; MEMS technology; RF MEMS; RF microelectromechanical systems; microwave engineering; reconfigurable RF front-ends; semiconductor technology; submillimeter-wave microsystem;
Conference_Titel :
VLSI Technology, Systems and Application (VLSI-TSA), 2015 International Symposium on
Conference_Location :
Hsinchu
DOI :
10.1109/VLSI-TSA.2015.7117597
