• DocumentCode
    712134
  • Title

    50×50 digital silicon photonic switches with MEMS-actuated adiabatic couplers

  • Author

    Tae Joon Seok ; Quack, Niels ; Sangyoon Han ; Wu, Ming C.

  • Author_Institution
    Univ. of California, Berkeley, Berkeley, CA, USA
  • fYear
    2015
  • fDate
    22-26 March 2015
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    We report on monolithically integrated 50×50 digital silicon photonic switches with MEMS actuation, sub-microsecond switching time, low optical insertion loss (<;9.6dB), high extinction ratio (50dB), broadband operation (1400-1700nm), and compact footprint (7.6×7.6mm2).
  • Keywords
    elemental semiconductors; integrated optics; micro-optomechanical devices; optical communication equipment; optical couplers; optical design techniques; optical fabrication; optical losses; optical switches; silicon; MEMS actuation; MEMS-actuated adiabatic couplers; Si; broadband operation; compact footprint; high extinction ratio; low optical insertion loss; micromechanical devices; monolithically integrated digital silicon photonic switches; submicrosecond switching time; Couplers; Insertion loss; Optical coupling; Optical device fabrication; Optical losses; Optical switches; Optical waveguides;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fiber Communications Conference and Exhibition (OFC), 2015
  • Conference_Location
    Los Angeles, CA
  • Type

    conf

  • Filename
    7121463
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=712134