Title :
50×50 digital silicon photonic switches with MEMS-actuated adiabatic couplers
Author :
Tae Joon Seok ; Quack, Niels ; Sangyoon Han ; Wu, Ming C.
Author_Institution :
Univ. of California, Berkeley, Berkeley, CA, USA
Abstract :
We report on monolithically integrated 50×50 digital silicon photonic switches with MEMS actuation, sub-microsecond switching time, low optical insertion loss (<;9.6dB), high extinction ratio (50dB), broadband operation (1400-1700nm), and compact footprint (7.6×7.6mm2).
Keywords :
elemental semiconductors; integrated optics; micro-optomechanical devices; optical communication equipment; optical couplers; optical design techniques; optical fabrication; optical losses; optical switches; silicon; MEMS actuation; MEMS-actuated adiabatic couplers; Si; broadband operation; compact footprint; high extinction ratio; low optical insertion loss; micromechanical devices; monolithically integrated digital silicon photonic switches; submicrosecond switching time; Couplers; Insertion loss; Optical coupling; Optical device fabrication; Optical losses; Optical switches; Optical waveguides;
Conference_Titel :
Optical Fiber Communications Conference and Exhibition (OFC), 2015
Conference_Location :
Los Angeles, CA
