Title :
Integrated photonic devices and circuits in multilayer silicon nitride-on-silicon platforms
Author :
Poon, Joyce K. S. ; Sacher, Wesley D. ; Ying Huang ; Guo-Qiang Lo
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Toronto, Toronto, ON, Canada
Abstract :
Low-loss silicon nitride waveguides integrated onto silicon photonic platforms enable the scaling to large-area photonic circuits. Properties of a multilayer silicon nitride-on-silicon platform and a variety of photonic devices and circuits will be described.
Keywords :
elemental semiconductors; integrated optics; optical losses; optical multilayers; optical waveguides; silicon; silicon compounds; Si3N4-Si; integrated photonic circuits; integrated photonic devices; large-area photonic circuits; low-loss silicon nitride waveguides; multilayer silicon nitride-on-silicon platforms; silicon photonic platforms; Couplers; Gratings; Loss measurement; Optical losses; Optical waveguides; Photonics; Silicon;
Conference_Titel :
Optical Fiber Communications Conference and Exhibition (OFC), 2015
Conference_Location :
Los Angeles, CA
