DocumentCode
71265
Title
Fabrication and Characterization of Biologically Inspired Curved-Surface Artificial Compound Eyes
Author
Qing He ; Jingquan Liu ; Bin Yang ; Yunzhao Dong ; Chunsheng Yang
Author_Institution
Sci. & Technol. on Micro/Nano Fabrication Lab., Shanghai Jiao Tong Univ., Shanghai, China
Volume
22
Issue
1
fYear
2013
fDate
Feb. 2013
Firstpage
4
Lastpage
6
Abstract
Curved artificial compound eyes (CACEs) are fabricated using microscale replication, stamping, and casting processes to form deposited 2-D microlens-pattern composite films into 3-D structures. The films are made up of polydimethylsiloxane (PDMS)-Parylene-C-PDMS layers. The layers are used for pattern replication, isolation, and buffering, respectively. The effect of the buffer layer on the ultimate 3-D structure is discussed. Multiple images of the human face in lateral- and axial-motion modes are obtained by these CACE prototypes. These images are used to evaluate the capability of the CACE to acquire multiangle images. The results give evidence that CACEs can potentially produce stereovision in microoptical systems.
Keywords
microlenses; micromechanical devices; stereo image processing; CACE prototypes; MEMS; axial-motion modes; biologically inspired curved-surface artificial compound eyes; buffer layer; casting processes; deposited 2D microlens-pattern composite films; human face; lateral-motion modes; microelectromechanical systems; microoptical systems; microscale replication; multiangle images; pattern isolation; pattern replication; polydimethylsiloxane-parylene-C-PDMS layers; stamping processes; stereovision; ultimate 3D structure; Arrays; Buffer layers; Compounds; Lenses; Microoptics; Optical device fabrication; Optical imaging; Curved artificial compound eyes (ACEs) (CACEs); Parylene-C; microelectromechanical systems (MEMS); multiangle images;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2012.2226934
Filename
6355942
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