A MEMS structure for acoustic energy harvesting using a DPL type BAW resonator mounted over a SOI substrate

A new acoustic energy harvesting model from a MEMS based BAW resonator is highlighted in this paper. Here, the resonator is designed by using a dual piezoelectric layer (DPL) which is a combination of two piezoelectric materials that were found effective from among the four piezoelectric materials that were used in our previous research paper, which are PZT-5H and Barium Titanate (BaTiO₃). Silicon-On-insulation (SOI) based substrate is used as the support layer for the composite layer instead of the traditional Silicon layer as it reduces the latch-up effect that tends to hampers the electrostatic performance of the device when integrated with CMOS SoC. Eigen frequency analysis, frequency domain analysis, absolute value of admittance vs. frequency plots, terminal current, total power dissipation, series resonance, surface deformation of the resonator and Q-factor are some studies done to determine the effective functionality of the device. All the design and simulation are carried in COMSOL Multiphysics environment.