Design, optimization and fabrication of two-dimension high contrast subwavelength grating (HCG) mirror on Silicon-on-insulator

Author

Shen-Che Huang ; Qiangsheng Huang ; Keqi Ma ; Jianhao Zhang ; Yaocheng Shi ; Daoxin Dai ; Tien-Chang Lu ; Sailing He

Author_Institution

Dept. of Photonics, Nat. Chiao-Tung Univ., Hsinchu, Taiwan

fYear

2015

fDate

4-6 May 2015

Firstpage

1

Lastpage

3

Abstract

The high contrast grating (HCG) mirror has been illustrated and characterized. The investigated parameters including grating periods and filling factors were calculated by finite-difference time-domain method. The two-dimension HCG was fabricated by electron-beam lithography and inductively coupled plasma process. The reflectivity of the fabricated HCG mirror was measured, resulting in around 200 nm bandwidth. The measured result also showed a good agreement with calculated one. This achievement was promising in developing the novel light emitters in the telecommunication region.

Keywords

diffraction gratings; electron beam lithography; finite difference time-domain analysis; integrated optics; mirrors; optical design techniques; optical fabrication; optimisation; plasma materials processing; reflectivity; silicon-on-insulator; HCG mirror design; HCG mirror fabrication; Si; electron beam lithography; filling factors; finite-difference time-domain method; grating periods; inductively coupled plasma process; light emitters; optimization; reflectivity; silicon-on-insulator; telecommunication region; two-dimension high contrast subwavelength grating mirror; Filling; Gratings; Mirrors; Optical device fabrication; Reflectivity; Silicon-on-insulator; gratings; nanostructure fabrication; silicon-on-insulator; subwavelength structure;

fLanguage

English

Publisher

ieee

Conference_Titel

Next-Generation Electronics (ISNE), 2015 International Symposium on

Conference_Location

Taipei

Type

conf

DOI

10.1109/ISNE.2015.7132036

Filename

7132036