Title :
Various Shapes of Plasma Spokes Observed in HiPIMS
Author :
Hecimovic, Ante ; von Keudell, Achim ; Schulz-von der Gathen, Volker ; Winter, Jessica
Author_Institution :
Dept. of Exp. Phys. II, Ruhr-Univ. Bochum, Bochum, Germany
Abstract :
A time-resolved analysis of the emission of power impulse magnetron sputtering plasmas reveals inhomogeneities in the form of rotating spokes. The shape of these spokes depends on the target material in a characteristic manner; the peculiar shape of the emission profiles is explained by the localization of the sputtering process as being governed by Ar gas rarefaction and the local dynamics of secondary electrons generation. This general picture is able to explain the observed emission patterns for different target materials as presented.
Keywords :
argon; plasma diagnostics; plasma materials processing; secondary electron emission; sputtering; Ar; Ar gas rarefaction; HiPIMS; emission profiles; high-power impulse magnetron sputtering plasmas; plasma spokes; rotating spokes; secondary electron generation; sputtering process; time-resolved analysis; Argon; Discharges (electric); Ionization; Plasmas; Shape; Sputtering; Plasma diagnostic; plasma measurements; plasma waves; plasma waves.;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2014.2330454
