Compact TL-RLC-TL model extraction from FW field solution for RF MEMS capacitive switch

This paper is focused on the extraction process of the radio frequency macromodel for a capacitive RF MEMS switch operating at microwave frequencies, which can accurately describe the RF response of the switch in the Off and On state. The procedure has three steps, first the per unit length parameters of the TL are determined then the Off state capacitance and finaly the RLC parameters in the actuated position of the switch. At each step the relative error between the compact model and the full-wave simulation is minimized, using as initial values analytically determined parameters coresponding to each step.