A 400µW differential FBAR sensor interface IC with digital readout

Author

Nagaraju, Manohar ; Sridaran, Suresh ; Lingley, Andrew ; Parker, Reed ; Ruby, Richard ; Otis, Brian

Author_Institution

Electr. Eng., Univ. of Washington, Seattle, WA, USA

fYear

2015

fDate

12-16 April 2015

Firstpage

218

Lastpage

221

Abstract

A low-power sensor interface IC suitable for a differential frequency measurement application is demonstrated. The circuit is used in a FBAR sensor system which includes a sensor and a reference FBAR. The sensor signal is processed and a digital output representing the sensor input is transmitted using a two wire serial interface. The architecture is entirely digital and benefits from scaling to advanced nodes. The IC is implemented in a 130nm CMOS process and consumes 400μW from a 0.75V supply.

Keywords

CMOS integrated circuits; acoustic transducers; bulk acoustic wave devices; frequency measurement; low-power electronics; readout electronics; thin film sensors; CMOS process; differential FBAR sensor interface IC system; differential frequency measurement application; digital readout; low-power sensor interface IC; power 400 muW; sensor signal processing; size 130 nm; thin film bulk acoustic wave resonator sensor; two wire serial interface; voltage 0.75 V; Film bulk acoustic resonators; Frequency measurement; Integrated circuits; Oscillators; Radiation detectors; Resonant frequency; Synchronization;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium & the European Frequency and Time Forum (FCS), 2015 Joint Conference of the IEEE International

Conference_Location

Denver, CO

Print_ISBN

978-1-4799-8865-5

Type

conf

DOI

10.1109/FCS.2015.7138827

Filename

7138827