Analysis of the impact of release area on the quality factor of contour-mode resonators by laser Doppler vibrometry

Author

Gibson, Brian ; Qalandar, Kamala ; Turner, Kimberly ; Cassella, Cristian ; Piazza, Gianluca

Author_Institution

Dept. of Mech. Eng., Univ. of California, Santa Barbara, Santa Barbara, CA, USA

fYear

2015

fDate

12-16 April 2015

Firstpage

709

Lastpage

712

Abstract

Energy dissipation through the anchors of an aluminum nitride (AlN) MEMS contour-mode resonator (CMR) plays an important role in setting the device quality factor at frequencies under 500MHz [1]. The acoustic energy leaving the resonator is effected, not only by the anchor, but also the portion of the surrounding device layer that has been released from the substrate during fabrication. Typical device simulations used for design do not take into account the motion of this additional area. Using laser Doppler vibrometery and COMSOL simulations we show a variation in device Q by 28% as a result of the motion of this released region.

Keywords

III-V semiconductors; Q-factor measurement; acoustic resonators; aluminium compounds; measurement by laser beam; microfabrication; micromechanical resonators; vibration measurement; wide band gap semiconductors; AlN; CMR; COMSOL simulation; MEMS contour-mode resonator; energy dissipation; laser Doppler vibrometry; quality factor; Aluminum nitride; Electrodes; III-V semiconductor materials; Optical resonators; Q-factor; Resonant frequency; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium & the European Frequency and Time Forum (FCS), 2015 Joint Conference of the IEEE International

Conference_Location

Denver, CO

Print_ISBN

978-1-4799-8865-5

Type

conf

DOI

10.1109/FCS.2015.7138940

Filename

7138940