Novel MEMS-based field emission pressure sensor with coupled membrane

Novel coupled membrane have been used to act as anode against CNT-based cathode for MEMS applications. The emission current density form the CNTs has been changed by changing the anode cathode distance using the air pressure applied to the movable membrane. Nonlinearity and low range of response in conventional membrane-based pressure sensors are critical parameters of such membrane. In this paper we have reported the coupled diaphragm to reduce these effects. Scientific rules of membrane were studied and relation for deflection of novel membrane was extracted. Deflection of novel coupled membrane in various pressure rang was calculated and simulated and hence variation in output current was measured. The optimum thicknesses for various pressures rang have evaluated. High sensitivity, wide range of response and low working voltage was prominent advantages of designed sensor.