DocumentCode :
718122
Title :
Novel MEMS-based field emission pressure sensor with coupled membrane
Author :
Dehghan, Pooya ; Koohsorkhi, J. ; Gharaei, H. ; Abbasi, A.
Author_Institution :
Fac. of New Sci. & Technol., Univ. of Tehran, Tehran, Iran
fYear :
2015
fDate :
10-14 May 2015
Firstpage :
1381
Lastpage :
1384
Abstract :
Novel coupled membrane have been used to act as anode against CNT-based cathode for MEMS applications. The emission current density form the CNTs has been changed by changing the anode cathode distance using the air pressure applied to the movable membrane. Nonlinearity and low range of response in conventional membrane-based pressure sensors are critical parameters of such membrane. In this paper we have reported the coupled diaphragm to reduce these effects. Scientific rules of membrane were studied and relation for deflection of novel membrane was extracted. Deflection of novel coupled membrane in various pressure rang was calculated and simulated and hence variation in output current was measured. The optimum thicknesses for various pressures rang have evaluated. High sensitivity, wide range of response and low working voltage was prominent advantages of designed sensor.
Keywords :
carbon nanotubes; cathodes; electron field emission; membranes; microsensors; pressure sensors; C; CNT-based cathode; MEMS-based field emission pressure sensor; coupled diaphragm; coupled membrane; deflection; optimum thicknesses; output current; pressure range; response range; working voltage; Conferences; Decision support systems; Electrical engineering; CNT; MEMS; coupled-membrane; fiedemission; pressure sensor;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electrical Engineering (ICEE), 2015 23rd Iranian Conference on
Conference_Location :
Tehran
Print_ISBN :
978-1-4799-1971-0
Type :
conf
DOI :
10.1109/IranianCEE.2015.7146434
Filename :
7146434
Link To Document :
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