Title :
Zno nanostructures via hydrothermal synthesis on atomic layer deposited seed-layers
Author :
Orlov, Anatolii ; Ulianova, Veronika ; Bogdan, Oleksandr ; Pashkevich, Genadzi ; Biyikli, Necmi ; Goldenberg, Eda ; Haider, Ali
Author_Institution :
Res. Inst. “Appl. Electron.”, Nat. Tech. Univ. of Ukraine “KPI”, Kiev, Ukraine
Abstract :
The original results of two different types of ZnO nanostructures grown via hydrothermal synthesis on ZnO seed-layers coated by atomic layer deposition process on Si substrates were presented. Scanning electron microscopy and X-ray diffractometry were used for the analysis of resulting nanostructured ZnO samples. The influence of annealing on crystal properties of the ZnO nanostructures was shown. It was ascertained that solution composition had a significant influence on the morphology of nanostructures and post-growth annealing modified the crystal properties of nanostructures.
Keywords :
II-VI semiconductors; X-ray diffraction; annealing; atomic layer deposition; crystal growth from solution; nanofabrication; scanning electron microscopy; semiconductor growth; wide band gap semiconductors; zinc compounds; Si; X-ray diffractometry; ZnO; atomic layer deposited seed-layers; hydrothermal synthesis; morphological properties; nanostructures; postgrowth annealing; scanning electron microscopy; solution composition; Annealing; Films; II-VI semiconductor materials; Nanostructures; Substrates; Zinc oxide; ZnO nanostructures; atomic layer deposition; hydrothermal synthesis; seed-layer; zinc acetate; zinc nitrate;
Conference_Titel :
Electronics and Nanotechnology (ELNANO), 2015 IEEE 35th International Conference on
Conference_Location :
Kiev
DOI :
10.1109/ELNANO.2015.7146841
