Title :
Porous silicon thin films with metallic nanoparticles on insulator subtrates
Author :
Obukhova, Tetyana ; Dusheiko, Mykhailo ; Borodinova, Tetyana
Author_Institution :
Microelectron. Dept., NTUU “KPI”, Kiev, Ukraine
Abstract :
In the paper optical properties and surface morphology of thin porous silicon layers on insulator substrate are investigated. It is shown that porous silicon can be formed from microcrystalline silicon layers and its morphology depends on type and orientation of insulator substrate. It was noticed that porous silicon transmission spectra notably differ from thin silicon spectra. Luminescence can be observed not only in the UV area (350-400 nm), but also in IR area (1000-1100 nm). This IR luminescence can be intensified by gold or silver nanoparticles chemically deposited on porous silicon surface.
Keywords :
electron beam deposition; elemental semiconductors; etching; gold; nanofabrication; nanoparticles; photoluminescence; porous semiconductors; semiconductor growth; semiconductor thin films; silicon; silver; surface morphology; Ag; Au; IR luminescence; Si; chemical deposition; electron-beam evaporation; insulator substrates; metallic nanoparticles; microcrystalline silicon layers; optical properties; porous silicon thin films; surface morphology; transmission spectra; wet chemical etching; Gold; Luminescence; Morphology; Nanoparticles; Silicon; Substrates; Surface morphology; metallic nanoparticles; porous silicon; thin film;
Conference_Titel :
Electronics and Nanotechnology (ELNANO), 2015 IEEE 35th International Conference on
Conference_Location :
Kiev
DOI :
10.1109/ELNANO.2015.7146853