DocumentCode
718566
Title
A new approach to improving the quality of measurements in multi-wave interference systems
Author
Guzhov, V.I. ; Ilinykh, S.P. ; Kabak, E.S. ; Rizhov, P.S.
Author_Institution
Novosibirsk State Technical University, NSTU, Russia
fYear
2015
fDate
21-23 May 2015
Firstpage
1
Lastpage
7
Abstract
This paper proposes a method of expanding the range and improving the accuracy of interferometric measurements using three wavelengths. The method is based on the methods of modular mathematics for phase unwrapping. Unlike the known methods of unwrapping the phase accuracy of the proposed method is almost independent of the value of the dynamic range.
Keywords
Dynamic range; Holography; Interference; Optical interferometry; Optical variables measurement; Semiconductor device measurement; Wavelength measurement; laser; measuring range; mechatronics; optical interference system; robotics;
fLanguage
English
Publisher
ieee
Conference_Titel
Control and Communications (SIBCON), 2015 International Siberian Conference on
Conference_Location
Omsk, Russia
Print_ISBN
978-1-4799-7102-2
Type
conf
DOI
10.1109/SIBCON.2015.7147033
Filename
7147033
Link To Document