Title :
A temperature control system used for improving resonant frequency drift of MEMS gyroscopes
Author :
Rui Guan ; Chunhua He ; Dachuan Liu ; Qiancheng Zhao ; Zhenchuan Yang ; Guizhen Yan
Author_Institution :
Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China
Abstract :
This paper introduces a temperature control system which uses incremental PID algorithm to improve the resonant frequency stability of a MEMS gyroscope. The frequency drift for the drive mode of the gyroscope is 0.3Hz/°C, while after adopting the temperature control system, the frequency is nearly stable and the standard deviation of the output is about 0.027. The experimental results has proved this method´s effectiveness and feasibility.
Keywords :
gyroscopes; micromechanical devices; stability; temperature control; three-term control; MEMS gyroscopes; incremental PID algorithm; resonant frequency drift; resonant frequency stability; temperature control system; Bridge circuits; Gyroscopes; Resonant frequency; Temperature; Temperature control; Temperature sensors; Vibrations; MEMS gyroscope; frequency drift; temperature control;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2015 IEEE 10th International Conference on
Conference_Location :
Xi´an
DOI :
10.1109/NEMS.2015.7147452
