Title :
Failure of a MEMS switch after environmental test
Author :
Ding Xuran ; Feng Yue ; Lou Wenzhong ; Guo Yunlong
Author_Institution :
Nat. Key Lab. of Electro-Mech. Eng. & Control, Beijing Inst. of Technol., Beijing, China
Abstract :
A MEMS switch based on electro-thermal and electro-explosion has been packaged before its humidity test, temperature shock test and ballistic shock test are taken. Some devices failed after the tests. The analysis of such a device is given in this paper.
Keywords :
failure analysis; microswitches; semiconductor device reliability; semiconductor device testing; MEMS switch failure; ballistic shock test; electroexplosion; electrothermal; environmental test; humidity test; temperature shock test; Atmosphere; Electric shock; Humidity; Micromechanical devices; Microswitches; Resistance; MEMS switch; environmental test; failure;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2015 IEEE 10th International Conference on
Conference_Location :
Xi´an
DOI :
10.1109/NEMS.2015.7147457
