DocumentCode
718916
Title
Investigation of reliability of MEMS gyroscopes under different shock conditions
Author
Pan Zhang ; Chunhua He ; Jimeng Zhang ; Qiancheng Zhao ; Zhenchuan Yang ; Dacheng Zhang ; Guizhen Yan
Author_Institution
Inst. of Microelectron., Peking Univ., Beijing, China
fYear
2015
fDate
7-11 April 2015
Firstpage
441
Lastpage
444
Abstract
In this work, the shock survivability of MEMS gyroscopes under different shock conditions are investigated. Both shock experiments and numerical simulations are carried out to study the influences of the shock load level, duration and damping conditions. The simulation results are consistent with the experimental results. The results indicate that the selections of natural frequencies and air-damping conditions are all critical to reach a desired shock resistances of the gyroscopes.
Keywords
damping; gyroscopes; microsensors; numerical analysis; reliability; shock measurement; MEMS gyroscope; air-damping condition; numerical simulation; reliability; shock resistance; shock survivability; Damping; Electric shock; Gyroscopes; Micromechanical devices; Reliability; Resistance; Simulation; MEMS; damping; gyroscope; shock; simulation;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems (NEMS), 2015 IEEE 10th International Conference on
Conference_Location
Xi´an
Type
conf
DOI
10.1109/NEMS.2015.7147463
Filename
7147463
Link To Document