Design and simulation of micro-platform for MEMS devices applied in shock environment

This paper proposes a conceptually simple Si-based shock-protection micro-platform to be integrated with MEMS devices. The micro-platform is able to generate a mitigated shock condition under impact via beam structures and air damping. This paper provides calculations of kinematic and mechanical parameters of the system, including stiffness coefficient and squeeze film damping coefficient, to offer some design guidelines. Some simulations have also been done to test its performance and it shows an approximately 34% attenuation under a 10000g shock.