Title :
A study of directional MEMS dual-fences gauge
Author :
Chengyu Ma ; Binghe Ma ; Jinjun Deng ; Xinhang Jin
Author_Institution :
Key Lab. of Micro/Nano Syst. for Aerosp., Northwestern Polytech. Univ., Xi´an, China
Abstract :
In this paper, MEMS surface fence gauges are developed to measure simultaneously the magnitude and direction of wall shear stress in wind tunnel under two-dimensional turbulent boundary layers. The dual-fences are packaged together orthogonal to each other. In order to avoid the mutual influence caused by the flow field disturbance, the optimization analysis of the relative location of the two fences is carried out, and the simulation results indicate that the coupling influence between dual-fences was basically eliminated while the separation distance of two fences is four times its own length. Comparison experiments are made to verify the correctness of the flow simulation results, and the directional sensitivities of dual MEMS surface fence are calibrated, which indicated that MEMS dual-fences are equipped to distinguish direction of wall shear stress.
Keywords :
boundary layer turbulence; calibration; electronics packaging; flow measurement; flow sensors; flow simulation; gauges; microsensors; optimisation; stress measurement; surface topography measurement; wind tunnels; MEMS surface fence gauge; calibration; direction measurement; directional MEMS dual-fence gauge; electronics packaging; flow field disturbance simulation; magnitude measurement; optimization analysis; two dimensional turbulent boundary layers; wall shear stress measurement; wind tunnel; Fluids; Micromechanical devices; Sensitivity; Sensor arrays; Stress; Stress measurement;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2015 IEEE 10th International Conference on
Conference_Location :
Xi´an
DOI :
10.1109/NEMS.2015.7147465