Title :
One dimensional simulation of microscale DBD plasma
Author :
Hai Wang ; Han Li ; Li Wen
Author_Institution :
Dept. of Precision Machinery & Instrum., Univ. of Sci. & Technol. of China, Hefei, China
Abstract :
An one dimensional multi-fluid plasma model is setup for micro-scale DBD plasma device. The micro-scale DBD plasma device has an inverted pyramidal cavity with metal-dielectric-metal structure. The features of Ar micro-plasma generated in micro-DBD device are numerical simulated through COMSOL software. The time evolutions of plasma parameters such as electrical potential, electron density, electron temperature are discussed in the simulation results.
Keywords :
argon; dielectric-barrier discharges; electric potential; electron density; plasma density; plasma devices; plasma dielectric properties; plasma simulation; plasma temperature; Ar microplasma; COMSOL software; electrical potential; electron density; electron temperature; inverted pyramidal cavity; metal-dielectric-metal structure; microscale DBD plasma device; one-dimensional multifluid plasma model; one-dimensional simulation; plasma parameters; time evolutions; Argon; Dielectrics; Discharges (electric); Electrodes; Plasma temperature; Radio frequency; Ar plasma; COMSOL; micro-DBD plasma; plasma model;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2015 IEEE 10th International Conference on
Conference_Location :
Xi´an
DOI :
10.1109/NEMS.2015.7147481
