• DocumentCode
    718942
  • Title

    Properties and applications of carbon nanofibers for atomic force microscopy

  • Author

    Rius, Gemma ; Matsui, Soichiro ; Tanemura, Masaki ; Lorenzoni, Matteo ; Perez-Murano, Francesc

  • Author_Institution
    Nagoya Inst. of Technol., Nagoya, Japan
  • fYear
    2015
  • fDate
    7-11 April 2015
  • Firstpage
    571
  • Lastpage
    574
  • Abstract
    Scanning probe techniques such as atomic force microscopy (AFM) or scanning probe lithography are powerful methods for the investigation and modification of surfaces at the nanometer scale. In these techniques, the tip curvature radius and aspect ratio of the probe play a crucial role. Here, we employ carbon nanofiber (CNF) as the tip apex of AFM probes. We show that CNF-AFM probes provide good performance in terms of both resolution and reliability when operating the AFM in dynamic mode. In addition, the CNF apex is responsible for an enhancement of the field-induced chemical reaction in a specific form of scanning probe lithography, local anodic oxidation (LAO), which allows the fabrication of silicon oxide (SiOx) patterns with sub-10 nm resolution.
  • Keywords
    atomic force microscopy; carbon fibres; nanofabrication; nanofibres; nanolithography; oxidation; silicon compounds; C; CNF-AFM probes; SiOx; aspect ratio; atomic force microscopy; carbon nanofiber; curvature radius; field-induced chemical reaction; local anodic oxidation; scanning probe lithography; scanning probe techniques; silicon oxide fabrication; size 10 nm; Atomic force microscopy; Carbon; Force; Oxidation; Probes; Silicon; atomic force microscope; carbon nanofiber; nanolithography;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems (NEMS), 2015 IEEE 10th International Conference on
  • Conference_Location
    Xi´an
  • Type

    conf

  • DOI
    10.1109/NEMS.2015.7147494
  • Filename
    7147494