DocumentCode :
718942
Title :
Properties and applications of carbon nanofibers for atomic force microscopy
Author :
Rius, Gemma ; Matsui, Soichiro ; Tanemura, Masaki ; Lorenzoni, Matteo ; Perez-Murano, Francesc
Author_Institution :
Nagoya Inst. of Technol., Nagoya, Japan
fYear :
2015
fDate :
7-11 April 2015
Firstpage :
571
Lastpage :
574
Abstract :
Scanning probe techniques such as atomic force microscopy (AFM) or scanning probe lithography are powerful methods for the investigation and modification of surfaces at the nanometer scale. In these techniques, the tip curvature radius and aspect ratio of the probe play a crucial role. Here, we employ carbon nanofiber (CNF) as the tip apex of AFM probes. We show that CNF-AFM probes provide good performance in terms of both resolution and reliability when operating the AFM in dynamic mode. In addition, the CNF apex is responsible for an enhancement of the field-induced chemical reaction in a specific form of scanning probe lithography, local anodic oxidation (LAO), which allows the fabrication of silicon oxide (SiOx) patterns with sub-10 nm resolution.
Keywords :
atomic force microscopy; carbon fibres; nanofabrication; nanofibres; nanolithography; oxidation; silicon compounds; C; CNF-AFM probes; SiOx; aspect ratio; atomic force microscopy; carbon nanofiber; curvature radius; field-induced chemical reaction; local anodic oxidation; scanning probe lithography; scanning probe techniques; silicon oxide fabrication; size 10 nm; Atomic force microscopy; Carbon; Force; Oxidation; Probes; Silicon; atomic force microscope; carbon nanofiber; nanolithography;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2015 IEEE 10th International Conference on
Conference_Location :
Xi´an
Type :
conf
DOI :
10.1109/NEMS.2015.7147494
Filename :
7147494
Link To Document :
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