DocumentCode
718942
Title
Properties and applications of carbon nanofibers for atomic force microscopy
Author
Rius, Gemma ; Matsui, Soichiro ; Tanemura, Masaki ; Lorenzoni, Matteo ; Perez-Murano, Francesc
Author_Institution
Nagoya Inst. of Technol., Nagoya, Japan
fYear
2015
fDate
7-11 April 2015
Firstpage
571
Lastpage
574
Abstract
Scanning probe techniques such as atomic force microscopy (AFM) or scanning probe lithography are powerful methods for the investigation and modification of surfaces at the nanometer scale. In these techniques, the tip curvature radius and aspect ratio of the probe play a crucial role. Here, we employ carbon nanofiber (CNF) as the tip apex of AFM probes. We show that CNF-AFM probes provide good performance in terms of both resolution and reliability when operating the AFM in dynamic mode. In addition, the CNF apex is responsible for an enhancement of the field-induced chemical reaction in a specific form of scanning probe lithography, local anodic oxidation (LAO), which allows the fabrication of silicon oxide (SiOx) patterns with sub-10 nm resolution.
Keywords
atomic force microscopy; carbon fibres; nanofabrication; nanofibres; nanolithography; oxidation; silicon compounds; C; CNF-AFM probes; SiOx; aspect ratio; atomic force microscopy; carbon nanofiber; curvature radius; field-induced chemical reaction; local anodic oxidation; scanning probe lithography; scanning probe techniques; silicon oxide fabrication; size 10 nm; Atomic force microscopy; Carbon; Force; Oxidation; Probes; Silicon; atomic force microscope; carbon nanofiber; nanolithography;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems (NEMS), 2015 IEEE 10th International Conference on
Conference_Location
Xi´an
Type
conf
DOI
10.1109/NEMS.2015.7147494
Filename
7147494
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