Effect of conductor thickness on on-chip 3-D inductor for RF applications

Author

Deevi, B.V.N.S.M. ; Rao, N. Bheema

Author_Institution

Dept. of E.C.E., Nat. Inst. of Technol. Warangal, Warangal, India

fYear

2015

fDate

28-30 May 2015

Firstpage

656

Lastpage

659

Abstract

On-chip inductors are characterized based on Quality factor, Inductance and Self resonant frequency values. These values depend on dimensions of the conductor. Quality factor of an inductor is highly dependent on conductor thickness, as conductor thickness increases Q value increases. In this paper simulation is carried out for inductor by varying conductor thickness to 0.5μm, 1μm, 2μm. The frequency response of this inductor by varying conductor thickness is observed from frequency range 10-100GHz, suitable for RF/Microwave applications. Simulation of proposed inductor is carried out in IE3D EM field solver to obtain quality factor and inductance values. Proposed inductor has area of cross-section 10×10μm² on silicon chip.

Keywords

Q-factor; conductors (electric); frequency response; inductance; inductors; microwave integrated circuits; silicon; three-dimensional integrated circuits; IE3D EM field solver; Q value; RF application; conductor thickness; frequency 10 GHz to 100 GHz; frequency range; frequency response; inductance; microwave application; on-chip 3-D inductor; quality factor; self resonant frequency value; silicon chip; Computational modeling; Parameter extraction; Radio access networks; Radio frequency; Spirals; Conductor thickness; Inductance; Inductor; Quality factor;

fLanguage

English

Publisher

ieee

Conference_Titel

Industrial Instrumentation and Control (ICIC), 2015 International Conference on

Conference_Location

Pune

Type

conf

DOI

10.1109/IIC.2015.7150823

Filename

7150823