Title :
On-wafer probe station for microwave metrology at the nanoscale
Author :
El Fellahi, A. ; Haddadi, K. ; Marzouk, J. ; Arscott, S. ; Boyaval, C. ; Lasri, T. ; Dambrine, G.
Author_Institution :
Inst. of Electron., Microelectron. & Nanotechnol., Univ. Lille 1, Villeneuve d´Ascq, France
Abstract :
A new generation of instrumentation is developed to address the challenge of on-wafer measurement of nanodevices in the microwave regime. The system proposed is built up with a vector network analyzer, a scanning electron microscope and home-made miniaturized ground-signal-ground (GSG) probes fabricated on silicon-on-insulator (SOI) technology and mounted on nano-positionners. A first generation of probing structures with contact sizes of 1μm2 have been designed, fabricated and characterized up to 40 GHz.
Keywords :
integrated circuit testing; microwave measurement; nanopositioning; network analysers; scanning electron microscopy; home made miniaturized ground-signal-ground probes; nanopositionner mounted probe; nanoscale microwave metrology; on-wafer probe station; scanning electron microscope; silicon-on-insulator technology; vector network analyzer; Microscopy; Microwave circuits; Microwave imaging; Microwave measurement; Nanoscale devices; Probes; ground-signal-ground (GSG) probe; high frequency (HF) probe; microwave nanodevices; on-wafer measurements;
Conference_Titel :
Instrumentation and Measurement Technology Conference (I2MTC), 2015 IEEE International
Conference_Location :
Pisa
DOI :
10.1109/I2MTC.2015.7151582
